CLX Series Low Frequency RF Power Supplies
Proven Reliability in Plasma Vacuum Systems Worldwide
The CLX series low frequency RF power supplies are available in power ranges from 600 to 12,000 Watts with fixed frequencies from 20 kHz to 2 MHz. A frequency agile option allows fast frequency timing to some loads. The conservatively rated solid-state design provides low cost of ownership with high reliability.
Performance
The CLX series low frequency RF power supplies are available in power ranges from 600 to 12,000 Watts with fixed frequencies from 20 kHz to 2 MHz. A frequency agile option allows fast frequency timing to some loads. The conservatively rated solid-state design provides low cost of ownership with high reliability.
Features
Reliable amplifier design with millions of trouble-free hours driving plasma systems worldwide
Local control via encoder and softkey inputs
Standard RS-232 and analog/digital control
Control circuitry ensures consistency during high VSWR conditions
Unique power monitoring measures delivered power into any impedance load
Active front panel with full controls and programmable microprocessor
Applications
The CLX series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. CVD and PVD, as well as induction and dielectric heating processes in industrial systems. Other applications include induction heating and ultrasonic welding.
Specifications
Power control: 0-10 VDC input for 0 to maximum-rated output
Power control linearity: ≤ 2% of setting at power levels above 10% of rated power
Frequency: Any fixed frequency from 20 kHz to 2 MHz* (optional frequency agility +/- 10% of center frequency)
Frequency stability: 350 kHz +/- 1%
*CLX 600/H Frequency: Any fixed frequency from 20 kHz to 800 kHz
Options
Wide range of AC input line voltages available
Master/Slave operation
Turbotune Technology providing unique frequency tuning
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