CLB Series Low Frequency RF Power Supplies
XP Comdel's Superior Design and Reliability in a Small, Lightweight Package
The CLB series incorporates all of the features and innovations developed in the previous CLF series with the added advantage of lighter weight and smaller size.
Performance
RF generators from the CLB product family are available in power ranges from 2500 to 12,000 Watts at a single frequency in the 20 kHz to 2 MHz band. The Turbotune Technology within the unit allows frequency tuning by automatically varying its output frequency +/-10% around its nominal frequency. The solid-state design provides precise and repeatable power control, ultra-stable output and low cost of ownership. The design of the CLB series is based on XP Comdel's proven RF amplifier technology.
Features
Small, lightweight packaging
Standard power ranges: 2500, 3000, 5000, 6000, 12,000 Watts
Any single frequency from 20 kHz to 2 MHz, varying +/-10%
Phase lock tuning or software algorithm
Designed to meet ETL and SEMI F47 directives
Applications
The CLB series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.
Specifications
Frequency: Any single frequency from 20 kHz to 2 MHz, varying +/-10%
Line frequency: 50/60 Hz
Analog power command: 0-10 VDC for 0 to maximum output
Standard power accuracy: 2 % (higher accuracies available)
Standard power linearity: 2% of setting at power levels above 10% of rated power
Power repeatability: +/- 1% of setpoint into a 50-ohm load
Options
High accuracy, low output control
Internal fixed match
DeviceNet