CB Series High Frequency RF Power Supplies
XP Comdel's Superior Design and Reliability in a Small, Lightweight Package

The CB series is the culmination of 45 years of RF plasma and heating experience. We have taken the proven rugged design of the CX series power amplifier section and combined it with all the innovation in DC supplies and diagnostics to make a compact, stable  RF power supply without compromising reliability for size.  These single frequency RF power supplies operate in the HF band (3.39MHz to 30MHz) still benefiting from XP Comdel’s “S” technology. 

Performance 
RF generators from the CB product family are available in power ranges from 50 to 5000 Watts with standard fixed frequencies from 13.56 MHz to 60 MHz. The solid-state design provides precise and repeatable power control, ultra-stable output and low cost of ownership. The design of the CB series is based on XP Comdel's proven RF amplifier technology.

‌Features

‌· Small, lightweight packaging

  • · Standard power ranges: 600, 1250, 3000, 5000 Watts

  • · Standard fixed frequencies: 3.39 MHz to 30 MHz

  • · Patented S-Technology provides ultra-stable output 
  •    This stabilizing technology optimizes amplifier performance, 
  •    reducing power-gain changes caused by plasma impedance fluctuations

  • · Designed to meet ETL and SEMI F47 directives

  • · Forward or Delivered power mode regulation

‌Applications

‌The CB series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, ICP, RF sputtering and PECVD, as well as induction and dielectric heating processes in industrial systems, and solar photovoltaic applications.

‌Specifications

‌· Frequency: Any fixed frequency from 3.39 to 30 MHz

  • · Frequency stability: +/- 0.005%

  • · Line frequency: 50/60 Hz

  • · Analog power command: 0-10 VDC for 0 to maximum output

  • · Standard power accuracy: 2 % (higher accuracies available)

  • · Standard power linearity: 2% of setting at power levels above 10% 
  •   of rated power

  • · Power repeatability: +/- 1% of setpoint into a 50-Ohm load

  • · Control I/O connector: Standard: 15-pin subminiature D type 
  •   (female), Optional: 25-pin subminiature D type (female)

  • · Harmonic distortion: Less than -35 dBc

  • · Reflected power limit: 20% of full scale typical

Options

‌‌· 3.39 and 6.78 MHz options available, added package height required
‌

  • ‌· High accuracy, low output control: +/- 1% of setpoint from 10-100% 
  •   rated power
  • ‌
  • ‌· Internal fixed match
  • ‌
  • ‌· Master/Slave operation
  • ‌
  • ‌· Frequency tuning
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  • ‌· DeviceNet